The Cryogenic Wafer Prober

The Cryogenic Wafer Prober, released in 2019, is developed to make automatic wafer probing at cryogenic temperatures well below 4 K possible. We have combined our expertise of building cryogen-free cryogenic systems with a neighboring company AEM, who has long experience in building automated wafer level test systems. Together we created the Cryogenic Wafer Prober. This tool allows up to 100 times faster throughput in sample characterization and we foresee that it will dramatically help speeding up the developments of cryogenic quantum devices, electronics and detectors.

Temperature Controller

The Bluefors Temperature Controller enhances the user experience of our cryogenic systems. With a modern and intuitive user interface, you gain direct control and overview of the system’s temperature status.

The Bluefors Temperature Controller is fully-integrated to all dilution refrigerator measurement systems.

Technical Specifications

Chuck temperatures well below 4 K are ensured with a dedicated closed-loop helium cooling system from Bluefors

Pre-cooling with pulse tube coolers, “cryogen-free”

Compatible with the full range of Bluefors existing cryogenic wiring options

Up to 300 mm wafers

Load-lock based wafer loading, with possibility of automatic wafer loading magazine-to-magazine

Cryogenic probe cards with direct connection to wiring

Active wafer and pin-to-pad alignment.

Probe station control and tester integration with embedded or customer chosen software.

Bluefors Oy
Arinatie 10
00370 Helsinki
FINLAND

Tel: +358 9 5617 4800
Fax: +358 9 386 7335
VAT: FI 2183 2199
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